Exploring Machine Learning for Semiconductor Process Optimization: A Systematic Review
IEEE Trans Artif Intell（2024）
关键词
Semiconductor Manufacturing,Semiconductor Process Optimization,Artificial Intelligence,Machine Learning,Deep Learning,Neural Networks,Lithography,Etching,Thin film,Chemical Mechanical Polishing,Scatterometry,Predictive Metrology,Virtual Metrology,Advanced Process Control,Root Cause Analysis
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