Fabrication of Uniform, Periodic Arrays of Exotic Aln Nanoholesby Combining Dry Etching and Hot Selective Wet Etching, Accessinggeometries Unrealisable from Wet Etching of Planar Aln
MICROELECTRONIC ENGINEERING（2025）
Key words
AlN dry etching,High temperature wet etching,Periodic AlN nanostructures,Combined dry and wet etching,Nanopyramidal pits PACS: 61.46,+ w
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