Metal Microstrip Line Defect Detection of Chip Based on THz-TDR Technology

Zhen Xu,De-Gang Xu,Long-Hai Liu,Ji-Ning Li, Jia-Xin Zhang, Tan Wang, Xiang Ren, Xiu-Ming Qiao, Jiang Chen

JOURNAL OF INFRARED AND MILLIMETER WAVES（2024）

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Key words

terahertz,time-domain reflection technology,microstrip line,integrated chip,defect detection

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