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CMOS- Compatible Reconstructive Spectrometers with Self- Referencing Integrated Fabry-Perot Resonators

Chunyu You, Xing Li, Yuhang Hu,Ningge Huang,Yang Wang,Binmin Wu, Guobang Jiang,Jiayuan Huang,Ziyu Zhang,Bingxin Chen,Yue Wu, Junhan Liu,Xiangzhong Chen,Enming Song,Jizhai Cui,Peng Zhou,Zengfeng Di,Zhenghua An,Gaoshan Huang,Yongfeng Mei

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA（2024）

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关键词
miniaturized spectrometers,Fabry-Perot resonators,silicon nanomembrane,CMOS- compatible integration
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