Design and Modeling of Spatial Parasitic Compensation Mechanisms Supporting Triaxial Compliant Positioning Stages
2024 6TH INTERNATIONAL CONFERENCE ON RECONFIGURABLE MECHANISMS AND ROBOTS, REMAR 2024（2024）
Key words
Theoretical Framework,Stiffness,Finite Element,Finite Element Analysis,Nanoimprint Lithography,Spatial Motion,Young’s Modulus,Modulation Of Activity,Finite Element Method,Circular Cross-section,Beam Theory,Flexible Hinge,Motion Stage
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