Pathfinding Process Development for the Realization of Atomic Precision Advanced Manufacturing (Apam)-Based Vertical Tunneling Field Effect Transistors for Enhanced Energy Efficiency

Evan M. Anderson,Christopher R. Allemang, Christopher Arose,Tzu-Ming Lu,Scott W. Schmucker, Thomas R. Sheridan,Jeffrey A. Ivie,Deanna M. Campbell, Ashlyn P. Vigil, Alisha G. Hawkins, Philip A. Gamache,Xujiao Gao, Thomas A. Weingartner, Shashank Misra

ECS Meeting Abstracts（2024）

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