Thermopile Infrared Detector Using Doped Polysilicon Nanocones Absorber for Selective Wavelength Absorption and Performance Enhancement
IEEE TRANSACTIONS ON ELECTRON DEVICES（2024）
Key words
Detectors,Absorption,Silicon,Etching,Nanostructures,Doping,Optical surface waves,Infrared (IR) detector,microelectromechanical systems (MEMSs),nanocones,selective wavelength absorption,thermopile
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