Thermally Robust Dual-Work Function ALD-MN/sub X/ MOSFETs Using Conventional CMOS Process Flow
D. Park, Z. Luo, N. Edleman, W. Zhu,P. Nguyen,K. Wong,C. Cabral,P. Jamison, B. Lee,A. Chou,M. Chudzik,J. Bruley,O. Gluschenkov,P. Ronsheim,A. Chakravarti, R. Mitchell,V. Ku, H. Kim,E. Duch,P. Kozłowski,C. D'Emic,V. Narayanan,A. Steegen, R. Wise,R. Jammy,R. Rengarajan, H. Ng,A. Sekiguchi,C. Wann semanticscholar（2004）
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