Fabrication of MEMS Microshutter Arrays for Cryogenic Applications
D. Kevin,E. Amatucci, M. Beamesderfer,S. Bajikar,A. Ewin,R. Fettig,D. Franz, L. Hess,M. Jhabvala, D. Kelly,T. King,Gunther Kletetschkar,A. Kutyrev,Mary J. Li,J. Loughlin,H. Moseley, L. Oh,C. Ray,E. Schulte,Wayne Smith, S. Snodgrass, V. Valeriano,Yun Zheng,C. Zincke semanticscholar（2006）
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