Detection and Compensation of Periodic Vibrations on a Nanometer Scale Using High-sensitivity Accelerometers in Digital Holography Sensors
IEEE SENSORS JOURNAL（2024）
Key words
Sensors,Holography,Optical sensors,Optical variables measurement,Vibrations,Measurement by laser beam,Holographic optical components,Digital holography,Fourier linear combiner,high-sensitivity accelerometer,periodic vibrations
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