First Demonstration of Monolithic Three-Dimensional Integration of Ultra-High Density Hybrid IGZO/Si SRAM and IGZO 2T0C DRAM Achieving Record-Low Latency (<10ns), Record-Low Energy (<10fj) of Data Transfer and Ultra-Long Data Retention (>5000S)

Symposium on VLSI Technology（2024）

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关键词

Data Transfer,Data Retention,Ultrahigh Density,Memory Hierarchy,Excellent Performance,Electron Beam Evaporation,Timing Diagram,Footprint Area

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