BEOL Compatible Ultra-Low Operating Voltage (0.5 V) and Preconfigured Switching Polarization States in Effective 3 Nm Ferroelectric HZO Capacitors
Symposium on VLSI Technology（2024）
关键词
BEOL compatibility,effective 3 nm HZO,ultra-low voltage,reliability,configurable states
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要