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Effects of External Parameters on Plasma Characteristics and Uniformity in a Dual Cylindrical Inductively Coupled Plasma

Pengyu Wang, Siyu Xing,Daoman Han,Yuru Zhang,Yong Li,Cheng Zhou,Fei Gao,Younian Wang

Plasma Science and Technology（2024）

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关键词
dual inductively coupled plasma,remote plasma,plasma uniformity,fluid model
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