High-quality Mid-infrared Chalcogenide Ring Resonator
2024 Conference on Lasers and Electro-Optics (CLEO)（2024）
Key words
Ring Resonator,Inductively Coupled Plasma,Resonance Frequency,Water Absorption,Chemical Vapor Deposition,Quality Factor,Nonlinear Optical,Thermal Evaporation,Electron Beam Lithography,Finite-difference Time-domain,Reactive Ion Etching,High Quality Factor,Dry Etching,Wide Range Of Wavelengths,Optical Parametric Oscillator,Absorption Of Substances,Free Spectral Range,Frequency Comb,Finite Element Analysis Simulation,Etching Depth
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