Development of High On/off Current Ratio in P-Type Copper Oxide Thin-Film Transistors with a Back-End-of-line Compatible Process

Chi-Yuan Kuo,Wei-Chen Lin, Tsung-Tien Lo, Ching-Hsuan Shen, Ming-Yu Shen, Chia-Chan Lee, Chi-Ping Lin, Yuang-Ming Lin, Haw-Tyng Huang,Po-Chun Yeh,Hsin-Chu Chen,Chih- Wu

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films（2024）

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