Surface-patterned Chalcogenide Glasses with High-Aspect-ratio Microstructures for Long-Wave Infrared Metalenses

Zhaofeng Gu,Yixiao Gao,Kongsi Zhou, Junyang Ge, Chen Xu,Lei Xu,Mohsen Rahmani, Ran Jiang,Yimin Chen,Zijun Liu,Chenjie Gu,Yaoguang Ma,Jianrong Qiu,Xiang Shen

Opto-Electronic Science（2024）

Faculty of Electrical Engineering and Computer Science

Cited 0|Views3

Abstract

Multidimensional-engineering chalcogenide glasses is widely explored to construct various infrared photonic devices,with their surface as a key dimension for wavefront control.Here,we demonstrate direct patterning high-aspect-ratio mi-crostructures on the surface of chalcogenide glasses offers an efficient and robust method to manipulate longwave in-frared radiations.Despite chalcogenide glass being considered soft in terms of its mechanical properties,we successfully fabricate high-aspect-ratio micropillars with a height of 8 μm using optimized deep etching process,and we demonstrate a 2-mm-diameter all-chalcogenide metalens with a numerical aperture of 0.45 on the surface of a 1.5-mm-thick As2Se3 glass.Leveraging the exceptional longwave infrared(LWIR)transparency and moderate refractive index of As2Se3 glass,the all-chalcogenide metalens produces a focal spot size of～1.39λ0 with a focusing efficiency of 47%at the wavelength of 9.78 μm,while also exhibiting high-resolution imaging capabilities.Our work provides a promising route to realize easy-to-fabricate,mass-producible planar infrared optics for compact,light-weight LWIR imaging systems.

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Key words

chalcogenide glasses,long wave infrared,metalens

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