Site-Controlled SiN/SiO2 Single Photon Sources Coupled to Silicon Nitride Integrated Photonics
2024 Conference on Lasers and Electro-Optics (CLEO)（2024）
Key words
Single Photon,Silicon Nitride,Single-photon Sources,Photonic Integration,High Yield,Fabrication Process,National Science Foundation,Single-photon Emission,Quantum Information,Department Of Energy,Quantum Technologies,Nanopillars,Office Of Science,Heterogeneous Integration,US National Science Foundation
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