Using a Convolutional Neural Network to Map Defects in Wide Bandgap Semiconductors at a Wafer Scale
IEEE NATIONAL AEROSPACE AND ELECTRONICS CONFERENCE, NAECON 2024（2024）
Key words
Neural Network,Convolutional Neural Network,Wide Bandgap,Wide Bandgap Semiconductor,Wafer Scale,Defects In Semiconductors,Manufacturing Process,Device Performance,Semiconductor Devices,Stacking Faults,Improvement In Size,Screw Dislocation,Structural Imperfections,Scanning Electron Microscopy,Training Data,False Negative,Optical Tomography,Computational Analysis,Positive Predictive Value,Negative Predictive Value,Number Of Dislocations,Convolutional Neural Network Training,Types Of Defects,Convolutional Neural Network Layers,Confusion Matrix,Accuracy Of Network
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