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Research on the Correlation Between the Dual Diffusion Behavior of Zinc in InGaAs/InP Single-Photon Avalanche Photodiodes and Device Performance

Mao-Fan Liu,Chun-Lei Yu,Ying-Jie Ma,Yi-Zhen Yu,Bo Yang, Yu Tian, Peng-Fei Bao,Jia-Sheng Cao, Yi Liu,Xue Li

JOURNAL OF INFRARED AND MILLIMETER WAVES(2024)

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关键词
InGaAs/InP single-photon avalanche photodiode,Diffusion depth,Znic diffusion,Dark count rate
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