Single-Component High-Resolution Dual-Tone EUV Photoresists Based on Precision Self-Immolative Polymers
Angewandte Chemie (International ed in English)（2024）
Key words
self-immolative polymer,precision polymer,dual-tone photoresist,electron beam lithography,EUV lithography
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined