Ultralow-Loss Silicon Nitride Microresonators Using Room-Temperature Sputtering

Shuangyou Zhang,Toby Bi,Irina Harder,Olga Ohletz,Florentina Gannott,Alexander Gumann,Eduard Butzen,Yaojing Zhang,Pascal Del'Haye

2024 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)（2024）

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关键词

Sputtering,Silicon Nitride,Room-temperature Sputtering,Thermal Annealing,Reactive Sputtering,Film Thickness,Photonic Integrated Circuits,Photonic Circuits,Microring Resonators

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