A Stress-Dispersed MEMS Bionic Turbulence Sensor with Enhanced Reliability
IEEE SENSORS JOURNAL（2024）
关键词
Sensors,Stress,Reliability,Microstructure,Micromechanical devices,Vectors,Robustness,Bionics,bullet-shaped package,high reliability,microelectromechanical system (MEMS),stress-dispersed,turbulence sensor
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