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Fabrication and Integration of Cooled Polarimetric Bolometer Arrays for Sub-Mm Wave Detection

V. Goudon,A. Aliane,L. Dussopt,H. Kaya,A. Vandeneynde,C. Vialle,G. Lasfargues,V. Reveret,A. Poglitsch,J. Martignac,F. Visticot,O. Gevin,X. de la Broise,A. Demonti,L. Rodriguez

2024 49TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES, IRMMW-THZ 2024（2024）

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关键词
Cooled silicon bolometer,above IC,low-temperature,polarization sensitive,sub-mm astronomy
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