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Towards the Solution of Coating Loss Measurements Using Thermoelastic-Dominated Substrates

L. Silenzi, F. Fabrizi,M. Granata, L. Mereni, M. Montani,F. Piergiovanni, A. Trapananti,F. Travasso,G. Cagnoli

Classical and Quantum Gravity(2024)SCI 3区

Univ Camerino | Univ Urbino Carlo Bo | Univ Claude Bernard Lyon 1 | Univ Lyon

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Abstract
The characterization of thin film parameters derives from the measurement difference between the coated and bare substrate. This method of comparison is based on the stationarity of the substrate: the characteristics of the substrate do not depend on the presence of the film. However, the thermoelastic loss of a coated substrate depends on the thermo-mechanical parameters of the film as well, which are generally unknown. When thermoelastic loss is dominant, the coating loss measurements are completely altered. In this paper, we propose a model that helps to understand the role of each material property in the thermoelasticity of layered plates, and with this we identified three possible cases in which any coating-substrate combination could be classified. In particular, we analyzed the IBS silica film deposited on silicon. Using the model, we were able to explain the experimental results and also selected a thinner substrate for future coating loss measurements. With this choice, cryogenic loss measurements on bare substrate confirm that thermoelastic loss becomes irrelevant for temperatures below 130 K-180 K, depending on the mode.
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thermoelastic dissipation,silicon,gravitational waves detectors,coatings
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要点】:本文提出了一种新的模型,用于理解和解释热弹性主导的基底上薄膜损失测量问题,并成功应用于解释实验结果,优化了实验条件。

方法】:通过建立热弹性层状板模型,分析了不同材料属性在热弹性中的作用,并识别出三种可能的基底与薄膜组合情况。

实验】:研究了IBS二氧化硅薄膜在硅基底上的热弹性损失,使用该模型解释了实验结果,并在130 K-180 K温度范围内通过裸基底低温损失测量验证了模型的有效性。