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Source-Drain Damage of Monolithic Complementary Field Effect Transistors: A Comprehensive Study of Failure Modes and Mitigation Strategies

Camila Toledo de Carvalho Cavalcante,Steven Demuynck,Emmanuel Dupuy,Thomas Chiarella,BT Chan,Pallavi Puttarame Gowda, Il Gyo Koo,Hans Mertens,Anne Vandooren,Farid Sebaai,Jef Geypen,Sujith Subramanian, Lucas Petersen Barbosa Lima,Serge Biesemans,Naoto Horiguchi

Extended Abstracts of the 2024 International Conference on Solid State Devices and Materials（2024）

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