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Submicron Embedded Air/GaN Diffraction Gratings for Photonic Applications

Oliwia Golyga,Grzegorz Muziol,Anna Feduniewicz-Zmuda,Marcin Siekacz,Henryk Turski,Tomasz Sochacki, Mateusz Slowikowski,Igor Prozheev,Filip Tuomisto,Emilia Pruszynska-Karbownik,Tomasz Fas,Jan Suffczynski,Czeslaw Skierbiszewski,Marta Sawicka

ADVANCED ELECTRONIC MATERIALS（2024）

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关键词
angle-resolved reflectivity,diffraction grating,electrochemical etching,gallium nitride,implantation doping,ultra-high-pressure annealing
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