谷歌浏览器插件
订阅小程序
在清言上使用
VIPCreated with Sketch.

Integration of GAA Monolayer MoS2 Nanosheet FETs with Gate First Process for Future 2D CFET Scaling

Fengben Xi, Himanshu Sharma,Xiangyu Wu,Tom Schram, Daire Conlon,Robert K. Grubbs, Pawan Kumar,Tien Dat Ngo,Souvik Ghosh, Fei Han,Dennis van Dorp,Devin Verreck,Surajit Sutar,Quentin Smets,Dennis Lin,Kaustuv Banerjee,Cesar Javier Lockhart de la Rosa,Ludovic Goux,Gouri Sankar Kar

2024 50TH IEEE EUROPEAN SOLID-STATE ELECTRONICS RESEARCH CONFERENCE, ESSERC 2024（2024）

引用 0|浏览0
关键词
KGAA,Nanosheet FET,2D,CFET,Monolayer MoS2
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要