Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Advanced Spectroscopic Methods for Probing In-Gap Defect States in Amorphous SiNx for Charge Trap Memory Applications

Hyun Don Kim,Minseon Gu,Kyu-Myung Lee, Hanyeol Ahn, Jinwoo Byun,Gukhyon Yon, Junghyun Beak, Hyeongjoon Lim, Jaemo Jung, Jaehyeon Park, Jwa Soon Kim, Haejoon Hahm, Soobang Kim, Won Ja Min,Moon Seop Hyun,Yun Chang Park,Gyungtae Kim,Yongsup Park,Moonsup Han,Eunjip Choi,Young Jun Chang

CURRENT APPLIED PHYSICS（2025）

Cited 0|Views3
Key words
Silicon nitride,SiNx,Spectroscopic ellipsometry,Reflection electron energy loss spectroscopy,Charge trap flash memory
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined