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Comparison of Rigorous Scattering Models to Accurately Replicate the Behaviour of Scattered Electromagnetic Waves in Optical Surface Metrology

Helia Hooshmand,Poul-Erik Hansen,Liwei Fu,Alexander Birk,Mirza Karamehmedovic, Peter Lehmann,Stephan Reichelt,Richard Leach,Samanta Piano

JOURNAL OF COMPUTATIONAL PHYSICS（2025）

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关键词
Light scattering,Rigorous model,Electric field,Maxwell's equation
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