Optical Fiber-Coupled Waveguide Grating Chip Sensor Fabricated by Ultraviolet Nanoimprint Lithography

Qiaoling Chen,Jianxin Cui,Zengling Ran,Xiu He, Xiaoxue Ruan, Shengyi Qiu,Yanbo Xiao, Qingqiang Zhu, Fei Zhang, Gaoli Xiao, Ziqiang Chen, Jiahui Yu,Yuan Gong

IEEE Trans Instrum Meas（2024）

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Key words

Gratings,Sensors,Resonance,Optical waveguides,Coatings,Sensitivity,Arrayed waveguide gratings,Fiber gratings,Substrates,Resists,Array sensing chip,Fano resonance,refractive index (RI) sensing,ultraviolet nanoimprint lithography (UV-NIL),waveguide grating

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