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Effect of the Self-Aligned Etching Thin P-Gan Layer on the Performance of AlGaN-based DUV LEDs with Various Chip Sizes

Yuling Wu, Tong Jia, Deyi Zhai, Zhaoqiang Liu, Wenjie Li,Chunshuang Chu,Kangkai Tian, Haoyan Liu,Yonghui Zhang,Xiaowei Sun,Zi-Hui Zhang

OPTICS EXPRESS(2024)

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