Electron Dynamics and SiO2 Etching Profile Evolution in Capacitive Ar/CHF3 Discharges Driven by Sawtooth-Tailored Voltage Waveforms Wan Dong,Liu-Qin Song, Yi-Fan Zhang,Li Wang, Yuan-Hong Song, Julian Schulzearxiv(2024)引用 0|浏览0AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要