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Atomic Layer Deposition for Stable InP-Based On-Chip Quantum Dot Microleds: Hybrid Quantum Dot Pockets.

Robin R. Petit,Resul Ozdemir,Hannes Van Avermaet,Luca Giordano,Jakob Kuhs,Andreas Werbrouck,Matthias Filez,Jolien Dendooven,Zeger Hens,Philippe F. Smet,Christophe Detavernier

ACS APPLIED MATERIALS & INTERFACES（2024）

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Key words
quantum dots,color conversion,on-chip QDLEDs,atomic layer deposition,polymers,hybrid barriers,digital light processing,QD pockets
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