N-Type Polysilicon by PVD Enabling Self-Aligned Back Contact Solar Cells
2024 IEEE 52nd Photovoltaic Specialist Conference (PVSC)（2024）
Key words
Solar Cells,Physical Vapor Deposition,Back Contact,N-type Polysilicon,Stacked Layers,Open-circuit Voltage,Separate Layers,Tunnel Junction,P-type Layer,N-type Layer,Annealing Temperature,Laser Ablation,Sheet Resistance,Total Resistance,Amorphous Silicon,Rear Side,Wet Chemical Etching,Bulk Crystalline,N-type Si
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