Flexible Bulk Acoustic Resonator Radio Frequency Sensor Based on PETA/Pb1.2(Zr0.52Ti0.48)O3/P Olymer Films Detecting Human Respiratory Humidity
ACS APPLIED ELECTRONIC MATERIALS(2024)
Key words
film bulk acoustic resonator,wearable device,Pb-1.2(Zr0.52Ti0.48)O-3,radio frequency sensor,human respiratory humidity,PETA
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