Intelligent MEMS Thermal Mass Flowmeter Based on Modified Sage-Husa Adaptive Robust-Strong Tracking Kalman Filtering
IEEE SENSORS JOURNAL（2025）
Key words
Sensors,Micromechanical devices,Flowmeters,Kalman filters,Accuracy,Velocity measurement,Biomedical measurement,Temperature measurement,Measurement uncertainty,Sensitivity,Gas flow,microelectromechanical system (MEMS),Sage-Husa adaptive Kalman filter (SHAKF),strong-tracking filter,thermal mass flowmeter (TMF)
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