Miniaturized Silicon-Based Capacitive Six-Axis Force/torque Sensor with Large Range, High Sensitivity, and Low Crosstalk Renjie Tan,Yong Xia,Xiangguang Han,Linya Huang,Wendi Gao,Chen Jia,Ping Yang,Qijing Lin, Shujiang Ding,Chenying Wang,Libo ZhaoMICROSYSTEMS & NANOENGINEERING（2024）引用 0|浏览1AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
