Design and Analysis of a Monolithic Tilt/Tip Platform Based on Anti-Symmetric Flexible Structure
2024 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)（2024）
Key words
high compactness,biaxial,tilt/tip stage,bridge amplification mechanism
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined