Optimized Fabrication of Subwavelength Slanted Gratings Via Laser Interference Lithography and Faraday Cage-Assisted Etching
Microelectronic Engineering（2025）
Key words
Subwavelength slanted gratings,Laser interference lithography,Two-dimensional lithography simulation model,Standing wave effect,Photoresist contrast curve,Faraday cage-assisted reactive ion etching
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