Temperature Compensation of MEMS Resonant Accelerometer Based on Multiple Parameter Decoupling from Single Resonator
IEEE SENSORS JOURNAL（2025）
关键词
Temperature measurement,Temperature sensors,Resonant frequency,Temperature,Optical resonators,Accelerometers,Temperature control,Frequency measurement,Micromechanical devices,Mathematical models,Dual-mode closed-loop measurement system (DCMS),first-order mode,MEMS resonant accelerometer (MRA),second-order mode
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