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50Nm DrGaN in 3D Monolithic GaN MOSHEMT and Silicon PMOS Process on 300mm GaN-on-Si(111)

Han Wui Then,M. Radosavljevic,S. Bader,A. Zubair,H. Vora,P. Koirala,M. Beumer, P. Nordeen, A. Vyatskikh,T. Hoff,J. Peck, N. Desai,H. Krishnamurthy,J. Yu,K. Ravichandran,P. Fischer

Power Electronic Devices and Components（2024）

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Key words
gallium nitride,monolithic integration,CMOS technology,layer transfer,driver integration,DrGaN,gallium nitride MOSHEMT
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