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Electric Field Micro Mill in the Nonlinear Regime with Enhanced Noise Density and Sensitivity

Lifang Ran, Guijie Wang, Shenglin Hou, Qianzhen Su, Jianhua Li,Bo Zhang,Xiaolong Wen,Najib Kacem,Ashwin A. Seshia

IEEE SENSORS（2024）

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Key words
micro electric field mill,nonlinearity,bifurcation point,hardening effects,softening effects
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