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Influence of Ar/C2H2 Flow Ratio on the Microstructure and Properties of Cr-containing DLC Films Deposited by Medium Frequency Magnetron Sputtering

Haijuan Mei, Zhengxuan Lu,Ji Cheng Ding,Shuai Liu,Yuan Liu, Min Zhou,Jun Zheng

JOURNAL OF ALLOYS AND COMPOUNDS（2025）

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关键词
DLC films,Cr-doping,Microstructure,Mechanical property,Tribological performance
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