High Inductance 3D Arch Inductor Based on Non-Photosensitive Polyimide

Zepeng Wang, Qianzhen Su, Chao Zhang,Bo Zhang,Xiaolong Wen, Haoyuan Zhao, Dandan Liu, Jingliang Li,Jianhua Li

MICROELECTRONIC ENGINEERING（2025）

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Key words

Inductor,Arch coils,Polyimide,Amorphous alloy wire

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