Nanomembrane Etching and Release Process for the Realization of Hybrid InP/Si Photonic-Crystal Surface-Emitting Lasers Using Micro-Transfer Printing

Olof Sjodin, Rutvik Urdhwareshe, Ishwor Koirala,Axel Stromberg,Mattias Hammar

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE（2024）

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III-V-silicon integrations,micro-transfer printings,photonic-crystal surface-emitting lasers,silicon photonics

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