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Comparation on the Tribological Properties of Textured Design Between Si/Ni-DLC and Si/Ta-DLC Composite Films

Yanxia Wu, Yanjie Xu, Ke Li,Bang Shi,Ying Liu,Yanpeng Gong, Shengwang Yu

VACUUM（2025）

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Key words
Texture,Si/Ni-DLC composite film,Si/Ta-DLC composite films,Tribological property,High temperature adaptability
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