Growth and Characterization of SiGe/Si Superlattice for Vertically Stacked DRAM

Hailing Wang, Xiangsheng Wang,Yanpeng Song, Xiaomeng Liu, Ying Zhang, Xinyou Liu,Guilei Wang,Chao Zhao

Journal of Materials Science Materials in Electronics（2025）

Cited 0|Views3

AI Read Science

Must-Reading Tree

Example

Generate MRT to find the research sequence of this paper

Chat Paper

Summary is being generated by the instructions you defined