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Near-infrared Confocal Laser Scanning Microscope System with InGaAs Focal Plane Array

Haotian Li, Junliang Liu,Yakui Dong,Cheng Fei,Yongfu Li, Shuolin Yang,Shuzhen Fan,Yunxia Liu,Xian Zhao

MEASUREMENT SCIENCE AND TECHNOLOGY(2025)

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Key words
confocal,near-infrared,high-contrast,three-dimensional
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