Charge Trapping in SiO2 Substrate During Electron Beam Deposition of CaF2 Thin Films of Different Thicknesses
Optical Materials X（2025）
关键词
Calcium fluoride,silicon dioxide,electron beam deposition,charge trapping,electron irradiation,photoelectron emission
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要