NANOFABRICATION AND PROFILE TAILORING OF HIGH INDEX TA₂O₅ OPTICAL GRATINGS FOR LIDAR USING C₄F₈/SF₆ PLASMA MIXTURES Marc Bernet,Chantal Silvestre,Kristian Buchwald,Jacob Andkjær, JÖRG HÜBNER,Henri Jansen,Rafael TaboryskiOptical Materials Express(2025)引用 0|浏览0AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要